4 PLC的软件控制逻辑
由滑台的PLC控制方法可知,应使步进电机的输入脉冲总数和脉冲频率受到相应的控制。因此在控制软件上设置一个脉冲总数和脉冲频率可控的脉冲信号发生器;对于频率较低的控制脉冲,可以利用PLC中的定时器构成,如图2所示。脉冲频率可以通过定时器的定时常数控制脉冲周期,脉冲总数控制则可以设置一脉冲计数器C10。当脉冲数达到设定值时,计数器C10动作切断脉冲发生器回路,使其停止工作。伺服机构的步进电机无脉冲输入时便停止运转,伺服执行机构定位。当伺服执行机构的位移速度要求较高时,可以用PLC中的高速脉冲发生器。不同的PLC其高速脉冲的频率可达4000~6000Hz。对于自动线上的一般伺服机构,其速度可以得到充分满足。MKS MASS FLOW CONTROLLER 1/4"VCR, 2000 SCCM, N2, 179A23CR3BM, SHIPSAMEDAY1617C3
MKS MASS FLOW CONTROLLER GAS 200 SCCM, GAS NH3, 1461C-00500RM-SPCAL 1617E3
MKS PRESSURE CONTROLLER GAS N2, 100 TORR, P99A12TCH6ATAA, SHIPSAMEDAY 1617E4
MKS Mass flow controller Gas Nitrogen 200 SCCM, 1479A01322CS1BM 1606P3
MKS Mass flow controller 20 SCCM, GAS N2, 1479A21CS1BM, SHIPSAMEDAY1606P1
MKS Mass flow controller 2000 sccm Gas N2, 1479A01323CS1BM, Shipsameday1606P2
MKS Mass flow controller 1/4" COMP, 100 SCCM, N2, 1479A01312CS1BM
KEYENCE Electromagnetic Liquid Flow Sensor FD-M5AYP SHIPSAMEDAY1629A19
Swagelok Ball Valve 2", FNPT SS-T68MF32-EK4, SST68MF32EK4
FESTO Manifold 10-VSVA-A-M52-AZD-A1-1T1L, VABE-S6-1LT-C-M1-S37
OMICRON CABLE PIC MPS, E2002510, K972001, PICMPS, W12817-1-2-001, K792001
SWAGELOK ALD 3 Way valve 1/4" X 1/2" FVCR, 6LVV-ALD6TG88DP-C, SHIPSAMEDAY107B3
Aptech REPAIR KIT FOR AP4550 VS RK,AP4550VS, RK,AP4550, 89-89000992RK 143P2
Festo SERVO MOTOR CONTROLLER, EMMS-AS-70-M-RS, 550118, SHIPSAMEDAY1534B3
MKS Baraton Capacitance Manometer 1 Torr, 628D01TBE1B, Shipdameday1212Q
MKS Baraton Capacitance Manometer 1000 TORR, 628B13TBE2B, Shipdameday1212W
ABB DSDX110, DSDX-110, YB161102-AH/4, 161102-03AH
Allen Bradley Processor 32K Module, HST174, 5601481, 634484-90, 1228C
Swagelok ALD valve 3 WAY 1/4" VCR, 6LVV-ALD3TFHHHP-CSV-VESPEL 1559P2
TEL TOKYO Electron 1D81-0000-13, 1D81-0000-0097A4, SHIPSAMEDAY1532D
Square D Thermal-magnetic CIRCUIT BREAKER 150A, 3P, JDF36150, RACK HH101
EDGE BY NANOMOTION EVALUATION KIT, SHIPSAMEDAY, Rack B “B66””
SWAGELOK ALD Valve 3 WAY 1/4" VCR, 6LVV-ALD3TF-HHHP-C, SHIPSAMEDAY1638D4
Nikon 4S003-057-STG-I/F1, KAB11005-V32, Shipsameday 1168Z2
SMC HIGH VACUUM VALVE 1/4" FVCR, XVD2-02VF-X507, XVD2-02VF, 1181P2
NTI XTENDEX ST-C5KVM-600M
Kinematica PT 3100D / 6100D Dispersing Aggregate 12 mm DIA, PT-DA12/2EC-B154,
GENERAL ELECTRIC POWER SUPPLY 531X112PSAAHG1
KINGS Connector Panel Mount Gold TNC F 0Hz to 11GHz, M39012/29-0503
BOSCH 0 608 830 226 CONTROLLER TIGHTENING
MKS PRESSURE TRANSDUCER 100 Torr, 1/4" FVCR, 722B12TCD2FK, SHIPSAMEDAY 1535C2
Polycom RTM-LAN4X1GB, PCB2700D-LO, VER A03-1.10, BRD2700e-Lo
SKF BEARING SPHERICAL ROLLER, 22211 EK/VA759
MKS Type 649, Mass Flow Controller, 649A11T51CADR, N2, 50 SCCM, 10 TORR 1374B2
MKS Type 649 Mass Flow Controller 649A-25061-S, GAS Ar, 50 SCCM, 100 TORR1374B3
MKS Type 649 Mass Flow Controller 649A12T53C3VR, N2, 5000 SCCM, 100 TORR 1374B4
SKF Bearing Roller 50mm Bore X 90mm OD x 23M22210EK/VA751, 22210 EK/VA751 1653W
Fujikin UA9103E0NUFD105, FPR-UDDF-71-6.35-3-316LP-PI-NBU, SUS316L-P, 1375C
MKS Type 649A Mass Flow Controller 1/4" VCR, 50 SCCM, He, 649A-25014
OMRON CCS RedLED LowAngle 170mm OD, LDR2-170RD-LA, SHIPSAMEDAY 1614D7
Radstone Technology PME CRR-1, PMECRR1, 421/1/23154/100, 23154-100 1531G
Radstone Technology PME CRR-2, PMECRR2, 421/1/23154/100, 24213-100 1531H
Iwaki Magnet Gear Pump MDG-M2T100N, Shipsameday154A1
Philips BOARD Ferromatik machines, 9404 462 03021, 940446203021
Swagelok ALD valve 1/4" VCR Thermal Actua, 6LVV-ALD3TMR4-P-C, SHIPSAMEDAY1549F5
MKS Interface Macronode, AS00550-04, SHIPSAMEDAY, Rack H H39
Electroid Particle B, EPB301108S24V, 0543-4015-B, 1216B
Metrobility Gig-E Services Line expansion module, 10M/100M/1G, R861-1S, 113Z1